Conformal oxide dry etch

ABSTRACT

A method of etching silicon oxide from a trench is described which allows more homogeneous etch rates up and down the sides of the trench. One disclosed method includes a sequential introduction of (1) a hydrogen-containing precursor and then (2) a fluorine-containing precursor into a substrate processing region. The temperature of the substrate is low during each of the two steps in order to allow the reaction to proceed and form solid residue by-product. A second disclosed method reverses the order of steps (1) and (2) but still forms solid residue by-product. The solid residue by-product is removed by raising the temperature in a subsequent sublimation step regardless of the order of the two steps.

CROSS-REFERENCES TO RELATED APPLICATIONS

This application claims the benefit of U.S. Prov. Pat. App. No. 61/773,967 filed Mar. 7, 2013, and titled “CONFORMAL OXIDE DRY ETCH,” which is hereby incorporated herein in its entirety by reference for all purposes.

STATEMENT AS TO RIGHTS TO INVENTIONS MADE UNDER FEDERALLY SPONSORED RESEARCH AND DEVELOPMENT

Not applicable

REFERENCE TO A “SEQUENCE LISTING,” A TABLE, OR A COMPUTER PROGRAM LISTING APPENDIX SUBMITTED ON A COMPACT DISK

Not applicable

BACKGROUND OF THE INVENTION

Integrated circuits are made possible by processes which produce intricately patterned material layers on substrate surfaces. Producing patterned material on a substrate requires controlled methods for removal of exposed material. Chemical etching is used for a variety of purposes including transferring a pattern in photoresist into underlying layers, thinning layers or thinning lateral dimensions of features already present on the surface. Often it is desirable to have an etch process which etches one material faster than another helping e.g. a pattern transfer process proceed. Such an etch process is said to be selective to the first material. As a result of the diversity of materials, circuits and processes, etch processes have been developed with a selectivity towards a variety of materials.

A Siconi™ etch is a remote plasma assisted dry etch process which involves the simultaneous exposure of a substrate to H₂, NF₃ and NH₃ plasma by-products. Remote plasma excitation of the hydrogen and fluorine species allows plasma-damage-free substrate processing. The Siconi™ etch is largely conformal and selective towards silicon oxide layers but does not readily etch silicon regardless of whether the silicon is amorphous, crystalline or polycrystalline. The selectivity provides advantages for applications such as shallow trench isolation (STI) and inter-layer dielectric (ILD) recess formation.

Such etch processing steps have been used to trim silicon oxide uniformly back from a narrow trench to former a wider trench before depositing metal to form a contact on a patterned substrate. Etch processes used until now may result in trench width variations in the event the walls of the trench are formed by silicon oxide deposited using distinct methods.

Methods are needed to provide greater uniformity of dry etch processes.

BRIEF SUMMARY OF THE INVENTION

A method of etching silicon oxide from a trench is described which allows more homogeneous etch rates up and down the sides of the trench. One disclosed method includes a sequential introduction of (1) a hydrogen-containing precursor and then (2) a fluorine-containing precursor into a substrate processing region. The temperature of the substrate is low during each of the two steps in order to allow the reaction to proceed and form solid residue by-product. A second disclosed method reverses the order of steps (1) and (2) but still forms solid residue by-product. The solid residue by-product is removed by raising the temperature in a subsequent sublimation step regardless of the order of the two steps.

Embodiments of the invention include methods of etching silicon oxide from the walls of a trench on a surface of a patterned substrate in a substrate processing region of a substrate processing chamber. The methods include at least four sequential steps of (i) exposing the patterned substrate to hydrogen by flowing a hydrogen-containing precursor into the substrate processing region, (ii) removing process effluents including unadsorbed hydrogen-containing precursor from the substrate processing region, (iii) exposing the patterned substrate to fluorine by flowing a fluorine-containing precursor into the substrate processing region to form solid by-products on the patterned substrate, and (iv) removing process effluents including unreacted fluorine-containing precursor from the substrate processing region. The methods further include a sublimation operation of raising a temperature of the substrate above a sublimation temperature to remove the solid by-products. The sublimation operation occurs after the step of exposing the patterned substrate to fluorine. The at least four sequential steps in combination with the sublimation operation are referred to collectively as an etch cycle.

Embodiments of the invention include methods of etching silicon oxide from the walls of a trench on a surface of a patterned substrate in a substrate processing region of a substrate processing chamber. The method includes at least four sequential steps of: (i) exposing the patterned substrate to fluorine by flowing a fluorine-containing precursor into the substrate processing region, (ii) removing process effluents including unadsorbed fluorine-containing precursor from the substrate processing region, (iii) exposing the patterned substrate to hydrogen by flowing a hydrogen-containing precursor into the substrate processing region to form solid by-products on the patterned substrate, and (iv) removing process effluents including unreacted hydrogen-containing precursor from the substrate processing region. The methods further include a sublimation operation of raising a temperature of the substrate above a sublimation temperature to remove the solid by-products. The sublimation operation occurs after the step of exposing the patterned substrate to hydrogen. The at least four sequential steps in combination with the sublimation operation are referred to collectively as an etch cycle.

Additional embodiments and features are set forth in part in the description that follows, and in part will become apparent to those skilled in the art upon examination of the specification or may be learned by the practice of the disclosed embodiments. The features and advantages of the disclosed embodiments may be realized and attained by means of the instrumentalities, combinations, and methods described in the specification.

BRIEF DESCRIPTION OF THE DRAWINGS

A further understanding of the nature and advantages of the disclosed embodiments may be realized by reference to the remaining portions of the specification and the drawings.

FIG. 1 are a flowchart of a sequential dry etch process according to disclosed embodiments.

FIG. 2 is a flow chart of another dry etch process according to disclosed embodiments.

FIG. 3 is a cross-sectional view of a processing chamber for performing etch processes according to disclosed embodiments.

FIG. 4 is a processing system for performing etch processes according to disclosed embodiments.

In the appended figures, similar components and/or features may have the same reference label. Further, various components of the same type may be distinguished by following the reference label by a dash and a second label that distinguishes among the similar components. If only the first reference label is used in the specification, the description is applicable to any one of the similar components having the same first reference label irrespective of the second reference label.

DETAILED DESCRIPTION OF THE INVENTION

A method of etching silicon oxide from a trench is described which allows more homogeneous etch rates up and down the sides of the trench. One disclosed method includes a sequential introduction of (1) a hydrogen-containing precursor and then (2) a fluorine-containing precursor into a substrate processing region. The temperature of the substrate is low during each of the two steps in order to allow the reaction to proceed and form solid residue by-product. A second disclosed method reverses the order of steps (1) and (2) but still forms solid residue by-product. The solid residue by-product is removed by raising the temperature in a subsequent sublimation step regardless of the order of the two steps.

Siconi™ etch processes are an example of a dry etch process and have used a hydrogen source such as ammonia (NH₃) in combination with a fluorine source such as nitrogen trifluoride (NF₃). The combination flows into a remote plasma system (RPS) and the plasma effluents created therein are flowed into a substrate processing region. The effluents react with exposed silicon oxide to form solid residue which is then sublimated from the surface to complete the etch process. A thickness variation may be observed along a heterogeneously deposited silicon oxide surface treated with any prior art dry etch including the aforementioned Siconi™ etch. The thickness variation may manifest itself as a “height” difference along the heterogeneously deposited silicon surface. For example, a multi-layer silicon oxide stack having BPSG silicon oxide, PECVD deposited oxide and HDP-CVD deposited oxide may be patterned to form heterogeneously deposited walls on the side of a trench. The BPSG material may etch quite rapidly whereas the PECVD silicon oxide would etch more slowly, and the HDP-CVD silicon oxide would etch slowest of all. A dry etch may be used to widen the trench in preparation for filling the trench with metal to form a contact. A prior art dry etch may form an A-shaped or V-shaped trench profile which would compromise the conductivity or electrical separation of contacts made in this manner.

Performing a Siconi™ etch using sequential steps, as described herein, has been found by the inventors to remove material at a consistent rate across a wide variety of silicon oxide layers. When multiple deposition methods are used on layers used to form the same trench, the walls may be referred to as heterogeneous silicon oxide or heterogeneously-deposited silicon oxide herein. The process sequences described herein produce solid by-products like prior art concurrent Siconi™ processes but ensure that just a couple of monolayers are removed during each etch cycle.

In order to better understand and appreciate the invention, reference is now made to FIG. 1 which is a flow chart of a sequential dry etch process, according to disclosed embodiments, applied to a patterned substrate having heterogeneously deposited silicon oxide sidewalls. The process begins when a patterned substrate having a trench with heterogeneous silicon oxide walls is transferred into a substrate processing region (operation 110). A flow of nitrogen trifluoride is directed into the substrate processing region (operation 120). Alternatively, the nitrogen trifluoride is flowed through a remote plasma region and excited in a plasma before it is flowed into the substrate processing region. The remote plasma region may be a distinct module from the substrate processing chamber or a compartment within the processing chamber separated from the substrate processing region by a showerhead. Regardless of whether the nitrogen trifluoride is excited in the remote plasma region or flowed directly into the substrate processing region, the flow of the fluorine-containing precursor and associated plasma effluents coat the silicon oxide with a fluorine-containing adsorbate layer or adlayer. Process effluents, including any unreacted fluorine-containing precursors, are then removed from the substrate processing region (operation 125).

Next, a flow of ammonia is directed into the substrate processing region (operation 130). Again, the ammonia may be flowed through a remote plasma region and excited in a plasma before it is flowed into the substrate processing region. The ammonia (and/or plasma effluents) react with the heterogeneous silicon oxide walls of the trench as well as its fluorine-containing adlayer still resident on the heterogeneous silicon oxide walls to form solid residue by-products. Process effluents, including any unreacted hydrogen-containing precursors (such as ammonia), are removed from the substrate processing region (operation 133). Operations 120-133 occur sequentially, which limits the copresence of hydrogen and fluorine in the substrate processing region and thereby limits the variation in etch rate between dense silicon oxide (e.g. HDP-CVD) and more porous or doped silicon oxide (e.g. BPSG). The temperature of the patterned substrate is maintained at a relatively low level in order to ensure the first fluorine-containing adlayer remains on the surface for the ammonia to react with. The temperature of the patterned substrate throughout the sequence of operations 120-133 may be below one of 90° C., 80° C., 70° C., 60° C., 50° C., 40° C. or 35° C., in disclosed embodiments. Operations 120-135 may be repeated an integral number of times to remove a selectable amount of material (i.e. removing a target thickness).

The substrate is heated to sublimate the solid by-products (operation 135). The temperature of the solid residue and the silicon oxide may be raised above one of 90° C., 100° C., 120° C. or 140° C. during the sublimation, in disclosed embodiments. The duration of the sublimation may be above one of 45 seconds, 60 seconds, 75 seconds, 90 seconds or 120 seconds, in disclosed embodiments. The width of the trenches may be less than one of 35 nm, 30 nm, 25 nm, 20 nm or 15 nm, in embodiments of the invention. Following sublimation, the patterned substrate is removed from the substrate processing region (operation 145).

Reference is now made to FIG. 2 which is a flow chart of a second exemplary sequential dry etch process, according to disclosed embodiments, applied to a patterned substrate having heterogeneously deposited silicon oxide sidewalls. The process begins when a patterned substrate having a trench with heterogeneous silicon oxide walls is transferred into a substrate processing region (operation 210). A flow of ammonia is directed into the substrate processing region (operation 220). Alternatively, the ammonia is flowed through a remote plasma region and excited in a plasma before it is flowed into the substrate processing region. The remote plasma region may again be a distinct module from the substrate processing chamber or a compartment within the processing chamber separated from the substrate processing region by a showerhead. Regardless of whether the ammonia is excited in the remote plasma region or flowed directly into the substrate processing region, the flow of the hydrogen-containing precursor and associated plasma effluents coat the silicon oxide with a hydrogen-containing adsorbate layer or adlayer. Process effluents, including any unreacted hydrogen-containing precursors, are then removed from the substrate processing region (operation 225).

Next, a flow of nitrogen trifluoride is directed into the substrate processing region (operation 230). Again, the nitrogen trifluoride may be flowed through a remote plasma region and excited in a plasma before it is flowed into the substrate processing region. The nitrogen trifluoride (and/or plasma effluents) react with the heterogeneous silicon oxide walls of the trench as well as its hydrogen-containing adlayer still resident on the heterogeneous silicon oxide walls to form solid residue by-products. Process effluents, including any unreacted fluorine-containing precursors (such as nitrogen trifluoride), are removed from the substrate processing region (operation 233). Operations 220-233 occur sequentially, which limits the copresence of hydrogen and fluorine in the substrate processing region and thereby limits the variation in etch rate between dense silicon oxide (e.g. HDP-CVD) and more porous or doped silicon oxide (e.g. BPSG). The temperature of the patterned substrate is maintained at a relatively low level in order to ensure the first fluorine-containing adlayer remains on the surface for the ammonia to react with. The temperature of the patterned substrate throughout the sequence of operations 220-233 may be below one of 90° C., 80° C., 70° C., 60° C., 50° C., 40° C. or 35° C., in disclosed embodiments. Operations 220-235 may be repeated an integral number of times to remove a selectable amount of material (i.e. removing a target thickness).

The substrate is heated to sublimate the solid by-products (operation 235). The temperature of the solid residue and the silicon oxide may be raised above one of 90° C., 100° C., 120° C. or 140° C. during the sublimation, in disclosed embodiments. The duration of the sublimation may be above one of 45 seconds, 60 seconds, 75 seconds, 90 seconds or 120 seconds, in disclosed embodiments. The width of the trenches may be less than one of 35 nm, 30 nm, 25 nm, 20 nm or 15 nm, in embodiments of the invention. Following sublimation, the patterned substrate is removed from the substrate processing region (operation 245).

A variety of precursors may be flowed into the substrate processing region or the remote plasma region to create plasma effluents as described herein. Generally speaking, a fluorine-containing precursor may be used to augment or replace the nitrogen-trifluoride used in the examples discussed above. The fluorine-containing precursor may include one or more of nitrogen trifluoride, hydrogen fluoride, diatomic fluorine, monatomic fluorine and fluorine-substituted hydrocarbons. Similarly, a hydrogen-containing precursor may be used to augment or replace the ammonia used in the examples discussed previously. The hydrogen-containing precursor may include one or more of atomic hydrogen, molecular hydrogen and ammonia. The hydrogen-containing precursor may be fluorine-free and the fluorine-containing precursor may be hydrogen-free. The inventors have also found that the hydrogen-containing precursor may be HF.

A cycle of etching (e.g. operations 120-135 or operations 220-235) removes more than 4 Å, less than 11 Å or between about 5 Å and about 10 Å of silicon oxide on the substrate in disclosed embodiments. A desirable aspect of the process described and claimed herein is that the claimed etch removes a very similar amount of material regardless of how the silicon oxide was deposited. These processes may prove especially useful when the walls of a trench are deposited by different methods (i.e. the walls are formed of heterogeneous silicon oxide). Etch cycles claimed herein remove between 4 Å and 11 Å of the silicon oxide despite the differing deposition methods. Additional sequential dry etch process parameters are disclosed in the course of describing an exemplary processing system.

Exemplary Processing System

FIG. 3 is a partial cross sectional view showing an illustrative processing chamber 1001, in which, embodiments of the invention may be carried out. Generally, a hydrogen-containing precursor and a fluorine-containing precursor may be introduced through one or more apertures 1051 into remote plasma region(s) 1061-1063. In the processes described and claimed herein, the precursors are sequentially introduced rather than being flowed into the substrate processing region 1040 at the same time. The precursors may or may not be excited by plasma power source 1046.

In one embodiment, the processing chamber 1001 includes a chamber body 1012, a lid assembly 1002, and a support assembly 1010. The lid assembly 1002 is disposed at an upper end of the chamber body 1012, and the support assembly 1010 is at least partially disposed within the chamber body 1012. The processing chamber 1001 and the associated hardware are preferably formed from one or more process-compatible materials (e.g. aluminum, stainless steel, etc.).

The chamber body 1012 includes a slit valve opening 1060 formed in a sidewall thereof to provide access to the interior of the processing chamber 1001. The slit valve opening 1060 is selectively opened and closed to allow access to the interior of the chamber body 1012 by a wafer handling robot (not shown). In one embodiment, a wafer can be transported in and out of the processing chamber 1001 through the slit valve opening 1060 to an adjacent transfer chamber and/or load-lock chamber, or another chamber within a cluster tool. An exemplary cluster tool which may include processing chamber 1001 is shown in FIG. 3.

In one or more embodiments, chamber body 1012 includes a chamber body channel 1013 for flowing a heat transfer fluid through chamber body 1012. The heat transfer fluid can be a heating fluid or a coolant and is used to control the temperature of chamber body 1012 during processing and substrate transfer. Heating the chamber body 1012 may help to prevent unwanted condensation of the gas or byproducts on the chamber walls. Exemplary heat transfer fluids include water, ethylene glycol, or a mixture thereof. An exemplary heat transfer fluid may also include nitrogen gas. Support assembly 1010 may have a support assembly channel 1004 for flowing a heat transfer fluid through support assembly 1010 thereby affecting the substrate temperature.

The chamber body 1012 can further include a liner 1033 that surrounds the support assembly 1010. The liner 1033 is preferably removable for servicing and cleaning. The liner 1033 can be made of a metal such as aluminum, or a ceramic material. However, the liner 1033 can be any process compatible material. The liner 1033 can be bead blasted to increase the adhesion of any material deposited thereon, thereby preventing flaking of material which results in contamination of the processing chamber 1001. In one or more embodiments, the liner 1033 includes one or more apertures 1035 and a pumping channel 1029 formed therein that is in fluid communication with a vacuum system. The apertures 1035 provide a flow path for gases into the pumping channel 1029, which provides an egress for the gases within the processing chamber 1001.

The vacuum system can include a vacuum pump 1025 and a throttle valve 1027 to regulate flow of gases through the processing chamber 1001. The vacuum pump 1025 is coupled to a vacuum port 1031 disposed on the chamber body 1012 and therefore, in fluid communication with the pumping channel 1029 formed within the liner 1033. The terms “gas” and “gases” are used interchangeably, unless otherwise noted, and refer to one or more reactants, catalysts, carrier, purge, cleaning, combinations thereof, as well as any other fluid introduced into the chamber body 1012. The term “precursor” is used to refer to any process gas which takes part in a reaction to either remove or deposit material from a surface.

Apertures 1035 allow the pumping channel 1029 to be in fluid communication with a substrate processing region 1040 within the chamber body 1012. The substrate processing region 1040 is defined by a lower surface of the lid assembly 1002 and an upper surface of the support assembly 1010, and is surrounded by the liner 1033. The apertures 1035 may be uniformly sized and evenly spaced about the liner 1033. However, any number, position, size or shape of apertures may be used, and each of those design parameters can vary depending on the desired flow pattern of gas across the substrate receiving surface as is discussed in more detail below. In addition, the size, number and position of the apertures 1035 are configured to achieve uniform flow of gases exiting the processing chamber 1001. Further, the aperture size and location may be configured to provide rapid or high capacity pumping to facilitate a rapid exhaust of gas from the chamber 1001. For example, the number and size of apertures 1035 in close proximity to the vacuum port 1031 may be smaller than the size of apertures 1035 positioned farther away from the vacuum port 1031.

A gas supply panel (not shown) is typically used to provide process gas(es) to the processing chamber 1001 through one or more apertures 1051. The particular gas or gases that are used depend upon the process or processes to be performed within the chamber 1001. Illustrative gases can include, but are not limited to one or more precursors, reductants, catalysts, carriers, purge, cleaning, or any mixture or combination thereof. Typically, the one or more gases introduced to the processing chamber 1001 flow into plasma volume 1061 through aperture(s) 1051 in top plate 1050. Alternatively or in combination, processing gases may be introduced more directly through aperture(s) 1052 into substrate processing region 1040. Aperture(s) 1052 bypass the remote plasma excitation and are useful for processes involving gases that do not require plasma excitation or processes which do not benefit from additional excitation of the gases. Electronically operated valves and/or flow control mechanisms (not shown) may be used to control the flow of gas from the gas supply into the processing chamber 1001. Depending on the process, any number of gases can be delivered to the processing chamber 1001, and can be mixed either in the processing chamber 1001 or before the gases are delivered to the processing chamber 1001.

The lid assembly 1002 can further include an electrode 1045 to generate a plasma of reactive species within the lid assembly 1002. In one embodiment, the electrode 1045 is supported by top plate 1050 and is electrically isolated therefrom by inserting electrically isolating ring(s) 1047 made from aluminum oxide or any other insulating and process compatible material. In one or more embodiments, the electrode 1045 is coupled to a power source 1046 while the rest of lid assembly 1002 is connected to ground. Accordingly, a plasma of one or more process gases can be generated in remote plasma region composed of volumes 1061, 1062 and/or 1063 between electrode 1045 and annular mounting flange 1022. In embodiments, annular mounting flange comprises or supports gas delivery plate 1020. For example, the plasma may be initiated and maintained between electrode 1045 and one or both blocker plates of blocker assembly 1030. Alternatively, the plasma can be struck and contained between the electrode 1045 and gas delivery plate 1020, in the absence of blocker assembly 1030. In either embodiment, the plasma is well confined or contained within the lid assembly 1002. Accordingly, the plasma is a “remote plasma” since no active plasma is in direct contact with the substrate disposed within the chamber body 1012. As a result, plasma damage to the substrate may be avoided since the plasma is separated from the substrate surface.

A wide variety of power sources 1046 are capable of activating the hydrogen-containing precursor (e.g. ammonia) and the nitrogen-containing precursor (nitrogen trifluoride). For example, radio frequency (RF), direct current (DC), or microwave (MW) based power discharge techniques may be used. Microwave frequencies are simply a subset of radio frequencies. The activation may also be generated by a thermally based technique, a gas breakdown technique, a high intensity light source (e.g., UV energy), or exposure to an x-ray source. Alternatively, a remote activation source may be used, such as a remote plasma generator, to generate a plasma of reactive species which are then delivered into the chamber 1001. Exemplary remote plasma generators are available from vendors such as MKS Instruments, Inc. and Advanced Energy Industries, Inc. In the exemplary processing system an RF power supply is coupled to electrode 1045. A higher-power microwave power source 1046 is beneficial in the event that reactive oxygen will also be produced using power source 1046.

The temperatures of the process chamber body 1012 and the substrate may each be controlled by flowing a heat transfer medium through chamber body channel 1013 and support assembly channel 1004, respectively. Support assembly channel 1004 may be formed within support assembly 1010 to facilitate the transfer of thermal energy. Chamber body 1012 and support assembly 1010 may be cooled or heated independently. For example, a heating fluid may be flown through one while a cooling fluid is flown through the other.

Other methods may be used to control the substrate temperature. The substrate may be heated by heating the support assembly 1010 (or a portion thereof, such as a pedestal) with a resistive heater or by some other means. In another configuration, gas delivery plate 1020 may be maintained at a temperature higher than the substrate and the substrate can be elevated in order to raise the substrate temperature. In this case the substrate is heated radiatively or by using a gas to conduct heat from gas delivery plate 1020 to the substrate. The substrate may be elevated by raising support assembly 1010 or by employing lift pins.

During the etch processes described herein, chamber body 1012 may be maintained within an approximate temperature range of between 50° C. and 80° C., between 55° C. and 75° C. or between 60° C. and 70° C. in disclosed embodiments. During exposure to precursors (including for example plasma effluents and oxidizing agents), the substrate may be maintained below the temperatures given previously, between about 15° C. and about 50° C., between about 22° C. and about 40° C., or near 30° C. in disclosed embodiments.

Plasma effluents include a variety of molecules, molecular fragments and ionized species. In the sequential processes described and claimed herein, the remote plasma may not be turned on during the process. Currently entertained theoretical mechanisms of prior art Siconi™ etching may or may not be entirely correct but plasma effluents are thought to include NH₄F and NH₄F.HF which react readily with low temperature substrates described herein. Plasma effluents may react with a silicon oxide surface to form (NH₄)₂SiF₆, NH₃ and H₂O products. The NH₃ and H₂O are vapors under the processing conditions described herein and may be removed from substrate processing region 1040 by vacuum pump 1025. A thin continuous or discontinuous layer of (NH₄)₂SiF₆ solid by-products is left behind on the substrate surface. A similar reaction is thought to be occurring for the sequential processes described and claimed herein, however, the intermediate(s) are created and used close to or on the surface of the substrate.

Following exposure to plasma effluents and the associated accumulation of solid by-products, the substrate may be heated to remove the by-products. In embodiments, the gas delivery plate 1020 is heatable by incorporating heating element 1070 within or near gas delivery plate 1020. The substrate may be heated by reducing the distance between the substrate and the heated gas delivery plate. The gas delivery plate 1020 may be heated to between about 100° C. and 150° C., between about 110° C. and 140° C. or between about 120° C. and 130° C. in disclosed embodiments. By reducing the separation between the substrate and the heated gas delivery plate, the substrate may be heated to above about 75° C., above about 90° C., above about 100° C. or between about 115° C. and about 150° C. in disclosed embodiments. The heat radiated from gas delivery plate 1020 to the substrate should be made sufficient to dissociate or sublimate solid (NH₄)₂SiF₆ on the substrate into volatile SiF₄, NH₃ and HF products which may be pumped away from substrate processing region 1040. Other methods of imparting heat to the substrate may also be used.

Nitrogen trifluoride (or another fluorine-containing precursor) may be flowed into remote plasma volume 1061 (or directly into substrate processing region 1040 when no remote plasma is used) at rates between about 25 sccm and about 200 sccm, between about 50 sccm and about 150 sccm or between about 75 sccm and about 125 sccm in disclosed embodiments. Ammonia (or hydrogen-containing precursors in general) may be flowed into remote plasma volume 1061 (or directly into substrate processing region 1040 as above) at rates between about 50 sccm and about 300 sccm, between about 75 sccm and about 250 sccm, between about 100 sccm and about 200 sccm or between about 120 sccm and about 170 sccm in disclosed embodiments.

Combined flow rates of hydrogen-containing and fluorine-containing precursors into the remote plasma region may account for 0.05% to about 20% by volume of the overall gas mixture; the remainder being a carrier gas. In one embodiment, a purge or carrier gas is first initiated into the remote plasma region before those of the reactive gases to stabilize the pressure within the remote plasma region.

Production of plasma effluents (when used) occurs within volumes 1061, 1062 and/or 1063 by applying plasma power to electrode 1045 relative to the rest of lid assembly 1002. Plasma power can be a variety of frequencies or a combination of multiple frequencies. In the exemplary processing system the plasma is provided by RF power delivered to electrode 1045. The RF power may be between about 1 watt and about 1000 watts, between about 5 watts and about 600 watts, between about 10 watts and about 300 watts or between about 20 watts and about 100 watts in disclosed embodiments. The RF frequency applied in the exemplary processing system may be less than about 200 kHz, less than about 150 kHz, less than about 120 kHz or between about 50 kHz and about 90 kHz in embodiments of the invention.

Substrate processing region 1040 can be maintained at a variety of pressures during the flow of ozone, oxygen, carrier gases and/or plasma effluents into substrate processing region 1040. The pressure may be maintained between about 500 mTorr and about 30 Torr, between about 1 Torr and about 10 Torr or between about 3 Torr and about 6 Torr in disclosed embodiments. Lower pressures may also be used within substrate processing region 1040. The pressure may be maintained below or about 500 mTorr, below or about 250 mTorr, below or about 100 mTorr, below or about 50 mTorr or below or about 20 mTorr in disclosed embodiments. The processing pressures are less important for the alternating exposure process described and claimed herein compared to a process where the fluorine-containing precursor and the hydrogen-containing precursor are both present at the same time in the substrate processing region (a.k.a. being copresent).

In one or more embodiments, the processing chamber 1001 can be integrated into a variety of multi-processing platforms, including the Producer™ GT, Centura™ AP and Endura™ platforms available from Applied Materials, Inc. located in Santa Clara, Calif. Such a processing platform is capable of performing several processing operations without breaking vacuum. Etching chambers that may implement embodiments of the present invention may include dielectric etch chambers, high-density plasma chemical vapor deposition (HDP-CVD) chambers, plasma enhanced chemical vapor deposition (PECVD) chambers, sub-atmospheric chemical vapor deposition (SACVD) chambers, and thermal chemical vapor deposition chambers, among other types of chambers.

Embodiments of the etching systems may be incorporated into larger fabrication systems for producing integrated circuit chips. FIG. 4 shows one such system 1101 of etching and deposition chambers according to disclosed embodiments. In the figure, a pair of FOUPs (front opening unified pods) 1102 supply substrate substrates (e.g., 300 mm diameter wafers) that are received by robotic arms 1104 and placed into a low pressure holding area 1106 before being placed into one of the wafer processing chambers 1108 a-f. A second robotic arm 1110 may be used to transport the substrate wafers from the holding area 1106 to the processing chambers 1108 a-f and back. Each processing chamber 1108 a-f, can be outfitted to perform a number of substrate processing operations including the dry etch processes described herein in addition to cyclical layer deposition (CLD), atomic layer deposition (ALD), chemical vapor deposition (CVD), physical vapor deposition (PVD), etch, pre-clean, degas, orientation and other substrate processes.

The processing chambers 1108 a-f may include one or more system components for depositing, annealing, curing and/or etching a flowable dielectric film on the substrate wafer. In one configuration, two pairs of the processing chamber (e.g., 1108 c-d and 1108 e-f) may be used to deposit dielectric material on the substrate, and the third pair of processing chambers (e.g., 1108 a-b) may be used to etch the deposited dielectric. In another configuration, all three pairs of chambers (e.g., 1108 a-f) may be configured to etch a dielectric film on the substrate. Any one or more of the processes described may be carried out on chamber(s) separated from the fabrication system shown in disclosed embodiments.

System controller 1157 is used to control motors, valves, flow controllers, power supplies and other functions required to carry out process recipes described herein. A gas handling system 1155 may also be controlled by system controller 1157 to introduce gases to one or all of the processing chambers 1108 a-f. System controller 1157 may rely on feedback from optical sensors to determine and adjust the position of movable mechanical assemblies in gas handling system 1155 and/or in processing chambers 1108 a-f. Mechanical assemblies may include the robot, throttle valves and susceptors which are moved by motors under the control of system controller 1157.

In an exemplary embodiment, system controller 1157 includes a hard disk drive (memory), USB ports, a floppy disk drive and a processor. System controller 1157 includes analog and digital input/output boards, interface boards and stepper motor controller boards. Various parts of multi-chamber processing system 1101 which contains processing chamber 1001 are controlled by system controller 1157. The system controller executes system control software in the form of a computer program stored on computer-readable medium such as a hard disk, a floppy disk or a flash memory thumb drive. Other types of memory can also be used. The computer program includes sets of instructions that dictate the timing, mixture of gases, chamber pressure, chamber temperature, RF power levels, susceptor position, and other parameters of a particular process.

A process for etching, depositing or otherwise processing a film on a substrate or a process for cleaning chamber can be implemented using a computer program product that is executed by the controller. The computer program code can be written in any conventional computer readable programming language: for example, 68000 assembly language, C, C++, Pascal, Fortran or others. Suitable program code is entered into a single file, or multiple files, using a conventional text editor, and stored or embodied in a computer usable medium, such as a memory system of the computer. If the entered code text is in a high level language, the code is compiled, and the resultant compiler code is then linked with an object code of precompiled Microsoft Windows® library routines. To execute the linked, compiled object code the system user invokes the object code, causing the computer system to load the code in memory. The CPU then reads and executes the code to perform the tasks identified in the program.

The interface between a user and the controller may be via a touch-sensitive monitor and may also include a mouse and keyboard. In one embodiment two monitors are used, one mounted in the clean room wall for the operators and the other behind the wall for the service technicians. The two monitors may simultaneously display the same information, in which case only one is configured to accept input at a time. To select a particular screen or function, the operator touches a designated area on the display screen with a finger or the mouse. The touched area changes its highlighted color, or a new menu or screen is displayed, confirming the operator's selection.

As used herein “substrate” may be a support substrate with or without layers formed thereon. The support substrate may be an insulator or a semiconductor of a variety of doping concentrations and profiles and may, for example, be a semiconductor substrate of the type used in the manufacture of integrated circuits. “Silicon oxide” may include minority concentrations of other elemental constituents such as nitrogen, hydrogen, carbon and the like. A gas may be a combination of two or more gases. The term “trench” is used throughout with no implication that the etched geometry has a large horizontal aspect ratio. Viewed from above the surface, trenches may appear circular, oval, polygonal, rectangular, or a variety of other shapes.

Having disclosed several embodiments, it will be recognized by those of skill in the art that various modifications, alternative constructions, and equivalents may be used without departing from the spirit of the disclosed embodiments. Additionally, a number of well known processes and elements have not been described in order to avoid unnecessarily obscuring the present invention. Accordingly, the above description should not be taken as limiting the scope of the invention.

Where a range of values is provided, it is understood that each intervening value, to the tenth of the unit of the lower limit unless the context clearly dictates otherwise, between the upper and lower limits of that range is also specifically disclosed. Each smaller range between any stated value or intervening value in a stated range and any other stated or intervening value in that stated range is encompassed. The upper and lower limits of these smaller ranges may independently be included or excluded in the range, and each range where either, neither or both limits are included in the smaller ranges is also encompassed within the invention, subject to any specifically excluded limit in the stated range. Where the stated range includes one or both of the limits, ranges excluding either or both of those included limits are also included.

As used herein and in the appended claims, the singular forms “a”, “an”, and “the” include plural referents unless the context clearly dictates otherwise. Thus, for example, reference to “a process” includes a plurality of such processes and reference to “the dielectric material” includes reference to one or more dielectric materials and equivalents thereof known to those skilled in the art, and so forth.

Also, the words “comprise,” “comprising,” “include,” “including,” and “includes” when used in this specification and in the following claims are intended to specify the presence of stated features, integers, components, or steps, but they do not preclude the presence or addition of one or more other features, integers, components, steps, acts, or groups. 

What is claimed is:
 1. A method of etching silicon oxide from the walls of a trench on a surface of a patterned substrate in a substrate processing region of a substrate processing chamber, the method comprising at least four sequential steps comprising: (i) exposing the patterned substrate to hydrogen by flowing a hydrogen-containing precursor into the substrate processing region, (ii) removing process effluents including unadsorbed hydrogen-containing precursor from the substrate processing region, (iii) exposing the patterned substrate to fluorine by flowing a fluorine-containing precursor into the substrate processing region to form solid by-products on the patterned substrate, and (iv) removing process effluents including unreacted fluorine-containing precursor from the substrate processing region; and further comprising a sublimation operation of raising a temperature of the substrate above a sublimation temperature to remove the solid by-products, wherein the sublimation operation occurs after the step of exposing the patterned substrate to fluorine, and wherein the at least four sequential steps in combination with the sublimation operation are referred to collectively as an etch cycle.
 2. The method of claim 1 wherein repeating the at least four sequential steps until a target thickness of the silicon oxide layer is removed.
 3. The method of claim 1 wherein the hydrogen-containing precursor is fluorine-free.
 4. The method of claim 1 wherein the fluorine-containing precursor is either HF or hydrogen-free.
 5. The method of claim 1 wherein a temperature of the patterned substrate is below 90° C. during the steps of exposing the patterned substrate to hydrogen and exposing the patterned substrate to fluorine.
 6. The method of claim 1 wherein the sublimation temperature is greater than 90° C.
 7. The method of claim 1 wherein the silicon oxide which forms a wall of the trench is heterogeneous in terms of deposition method but the etch cycle removes between 4 Å and 11 Å of the silicon oxide despite the differing deposition methods.
 8. The method of claim 1 wherein the hydrogen-containing precursor is passed through a remote plasma before entering the substrate processing region.
 9. The method of claim 1 wherein the fluorine-containing precursor is passed through a remote plasma before entering the substrate processing region.
 10. The method of claim 1 wherein the hydrogen-containing precursor comprises at least one precursor selected from the group consisting of atomic hydrogen, molecular hydrogen and ammonia.
 11. The method of claim 1 wherein the fluorine-containing precursor comprises at least one precursor selected from the group consisting of nitrogen trifluoride, hydrogen fluoride, diatomic fluorine, monatomic fluorine.
 12. A method of etching silicon oxide from the walls of a trench on a surface of a patterned substrate in a substrate processing region of a substrate processing chamber, the method comprising at least four sequential steps comprising: (i) exposing the patterned substrate to fluorine by flowing a fluorine-containing precursor into the substrate processing region, (ii) removing process effluents including unadsorbed fluorine-containing precursor from the substrate processing region, (iii) exposing the patterned substrate to hydrogen by flowing a hydrogen-containing precursor into the substrate processing region to form solid by-products on the patterned substrate, and (iv) removing process effluents including unreacted hydrogen-containing precursor from the substrate processing region; and further comprising a sublimation operation of raising a temperature of the substrate above a sublimation temperature to remove the solid by-products, wherein the sublimation operation occurs after the step of exposing the patterned substrate to hydrogen, and wherein the at least four sequential steps in combination with the sublimation operation are referred to collectively as an etch cycle.
 13. The method of claim 12 wherein repeating the at least four sequential steps until a target thickness of the silicon oxide layer is removed.
 14. The method of claim 12 wherein the hydrogen-containing precursor is fluorine-free.
 15. The method of claim 12 wherein the fluorine-containing precursor is either HF or hydrogen-free.
 16. The method of claim 12 wherein a temperature of the patterned substrate is below 90° C. during the steps of exposing the patterned substrate to hydrogen and exposing the patterned substrate to fluorine.
 17. The method of claim 12 wherein the sublimation temperature is greater than 90° C.
 18. The method of claim 12 wherein the silicon oxide which forms a wall of the trench is heterogeneous in terms of deposition method but the etch cycle removes between 4 Å and 11 Å of the silicon oxide despite the differing deposition methods. 